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DOI: 10.4121/5ee28e71-b319-4428-a89b-2ba557efd907

Xu, Minxing; Norte, Richard; Steeneken, Peter; Otte, Sander (2025): Data underlying the publication: High‐Strength amorphous silicon carbide for nanomechanics. Version 1. 4TU.ResearchData. dataset. https://doi.org/10.4121/5ee28e71-b319-4428-a89b-2ba557efd907.v1

Categories

• Condensed Matter Physics
• Quantum Physics
• Physical Sciences

Keywords

High tensile strength High-Q Nanomechanics Wafer-scale amorphous thin film

Licence

Restrictive Licence

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by Minxing Xu , Richard Norte , Peter Steeneken , Sander Otte

Data and codes about the 1st paper "High‐Strength amorphous silicon carbide for nanomechanics", which including the codes for analytical derivation, the COMSOL model for simulation and the experimental results. The contents are organized based on the number of figures in the published paper.

History

• 2025-03-18 first online, published, posted

Publisher

4TU.ResearchData

Format

MATLAB/.m; spreadsheet/.xlsx; image/.pdf; image/.png; Adobe Illustrator/.ai; Powerpoints/.ppt; Comsol/.mph; Mathematica/.nb; g-zipped shape files

Associated peer-reviewed publication

High‐Strength amorphous silicon carbide for nanomechanics

Funding

• Probing the physics of exotic superconductors with microhip Casimir experiments 740.018.020

Organizations

Kavli Institute of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology;
TU Delft, Faculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Dynamics of Micro and Nano systems Group

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