@misc{https://doi.org/10.4121/5ee28e71-b319-4428-a89b-2ba557efd907.v1,
  doi = {10.4121/5ee28e71-b319-4428-a89b-2ba557efd907.v1},
  url = {},
  author = {Xu, Minxing and Norte, Richard and Steeneken, Peter and Otte, Sander},
  keywords = {Nanomechanics, High-Q, High tensile strength, Wafer-scale amorphous thin film},
  title = {Data underlying the publication: High‐Strength amorphous silicon carbide for nanomechanics},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {Restrictive Licence},
}