TY - DATA
T1 - Data underlying the publication: Blocking mechanisms in area-selective ALD by small molecule inhibitors of different sizes: Steric shielding versus chemical passivation
PY - 2024/05/02
AU - Pengmei Yu
AU - Marc Merkx
AU - Ilker Tezsevin
AU - Paul C. Lemaire
AU - Dennis M. Hausmann
AU - Tania E. Sandoval
AU - Wilhelmus M. M. Kessels
AU - Adrie Mackus
UR - 
DO - 10.4121/c357264b-f395-4409-bedc-328f45f6e6ac.v2
KW - Small molecule inhibitors
KW - Area-selective deposition
KW - Atomic layer deposition
KW - Fourier-transform infrared spectroscopy
KW - Spectroscopic ellipsometry
N2 - <p>The publication is focused on unravelling the contributions of two important factors to the blocking performance of small molecule inhibitors: steric shielding and chemical passivation, which was explored both experimentally and theoretically.&nbsp;The dataset contains the raw data, inputs and outputs files for simulations, images and tables for the manuscript.</p>
ER -