TY - DATA
T1 - Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators
PY - 2022/07/06
AU - Matthijs de Jong
AU - Richard A. Norte
AU - Peter Steeneken
AU - Andrea Cupertino
AU - Malte ten Wolde
UR - https://data.4tu.nl/articles/dataset/Data_supporting_the_paper_Mechanical_dissipation_by_substrate-mode_coupling_in_SiN_resonators/19209333/1
DO - 10.4121/19209333.v1
KW - SiN membrane
KW - Coupled Oscillators
KW - trampoline membrane
KW - mechanical dissipation factor
KW - Q-factor
N2 - <p>Data supporting the paper "Mechanical dissipation by substrate-mode coupling in SiN resonators" of M.H.J. de Jong, Malte A. ten Wolde, A. Cupertino, Peter G. Steeneken and Richard A. Norte.</p>
<p>This zip file contains the individual figures of the publication, the (analyzed) data plotted in those figures and several (example) raw datasets. Also contained are the measurement and analysis scripts to obtain the raw and analyzed data, and several finite-element simulations as described in the publication. Detailed information is contained in the 'Readme.txt' file within the zip file.<br>
</p>
ER -