TY - DATA
T1 - Data underlying the publication: High‐Strength amorphous silicon carbide for nanomechanics
PY - 2025/03/18
AU - Minxing Xu
AU - Richard Norte
AU - Peter Steeneken
AU - Sander Otte
UR - 
DO - 10.4121/5ee28e71-b319-4428-a89b-2ba557efd907.v1
KW - Nanomechanics
KW - High-Q
KW - High tensile strength
KW - Wafer-scale amorphous thin film
N2 - <p>Data and codes about the 1st paper "High‐Strength amorphous silicon carbide for nanomechanics", which including the codes for analytical derivation, the COMSOL model for simulation and the experimental results. The contents are organized based on the number of figures in the published paper.</p>
ER -