TY - DATA
T1 - Data underlying the publication: Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films
PY - 2024/11/07
AU - Meike Pieters
AU - Lina Bartel
AU - Cristian van Helvoirt
AU - Mariadriana Creatore
UR - 
DO - 10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1
KW - Atomic Layer Deposition
KW - precursors
KW - lithium
KW - reaction mechanism
KW - mass spectrometry
N2 - <p>The publication is focused on unraveling the reaction mechanism of the lithium hexamethyldisilazide precursor for the growth of Si-free Li-containing thin films by atomic layer deposition (ALD). For this purpose the precursor was combined with various co-reactants and the ALD processes were investigated in situ by quadrupole mass spectrometry (QMS). The dataset contains the raw spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS) and QMS data, and the processed data.</p>
ER -