%0 Generic
%A Xu, Minxing
%A Norte, Richard
%A Steeneken, Peter
%A Otte, Sander
%D 2025
%T Data underlying the publication: High‐Strength amorphous silicon carbide for nanomechanics
%U 
%R 10.4121/5ee28e71-b319-4428-a89b-2ba557efd907.v1
%K Nanomechanics
%K High-Q
%K High tensile strength
%K Wafer-scale amorphous thin film
%X <p>Data and codes about the 1st paper "High‐Strength amorphous silicon carbide for nanomechanics", which including the codes for analytical derivation, the COMSOL model for simulation and the experimental results. The contents are organized based on the number of figures in the published paper.</p>
%I 4TU.ResearchData