@misc{https://doi.org/10.4121/ff8e2171-87d6-4bf4-a5cb-7930cf45b366.v1,
  doi = {10.4121/ff8e2171-87d6-4bf4-a5cb-7930cf45b366.v1},
  url = {},
  author = {Buijtendorp, Bruno},
  keywords = {silicon, amorphous, a-Si:H, hydrogenated, FTIR, Raman, ellipsometry, microwave, dielectric, loss},
  title = {Data  underlying the publication: Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC0},
}