@misc{https://doi.org/10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902.v1,
  doi = {10.4121/e0ee9a7f-b71c-420a-adb5-dca482fc8902.v1},
  url = {},
  author = {Varveris, Ioannis},
  keywords = {SRIM, simulations, ion implantation, fabrication, TRIM},
  title = {SRIM simulation data underlying the PhD thesis "Quantum sensing and fabrication of color centers in diamond: Toward a quantum biosensor based on CMOS-integrated NV centers"},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {CC BY-NC-ND 4.0},
}