@misc{https://doi.org/10.4121/d4e0b3c6-d544-4c26-b43f-128c23332c93.v1,
  doi = {10.4121/d4e0b3c6-d544-4c26-b43f-128c23332c93.v1},
  url = {},
  author = {Santoso, Albert and van Ommen, J.Ruud  and van Steijn, Volkert and Boukany, Pouyan},
  keywords = {atomic layer deposition, microfluidics, PDMS, in situ modification},
  title = {Dataset for Atmospheric pressure atomic layer deposition for in-channel surface modification of PDMS microfluidic chips},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC BY-NC-ND 4.0},
}