@misc{https://doi.org/10.4121/c29dd5f3-68bf-4f5a-a159-00f0c1579541.v1, doi = {10.4121/c29dd5f3-68bf-4f5a-a159-00f0c1579541.v1}, url = {}, author = {Santoso, Albert and van Ommen, J.Ruud and van Steijn, Volkert}, keywords = {atomic layer deposition, PDMS, polymer, nanolayers}, title = {Dataset for Atmospheric pressure atomic layer deposition to increase organic solvent resistance of PDMS}, publisher = {4TU.ResearchData}, year = {2024}, copyright = {CC BY-NC 4.0}, }