@misc{https://doi.org/10.4121/77771657-07d7-464b-80da-d6a6a375cabb.v1,
  doi = {10.4121/77771657-07d7-464b-80da-d6a6a375cabb.v1},
  url = {},
  author = {Santoso, Albert and van Steijn, Volkert and van Ommen, J.Ruud },
  keywords = {PDMS, atmospheric pressure atomic layer deposition, titanium oxide, wettability, functionalization},
  title = {Dataset for Robust surface functionalization of PDMS through atmospheric pressure atomic layer deposition},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC BY-NC 4.0},
}