@misc{https://doi.org/10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1,
  doi = {10.4121/06bf96d9-18a7-4738-a1d8-efa8abbc7154.v1},
  url = {},
  author = {Pieters, Meike and Bartel, Lina and van Helvoirt, Cristian and Creatore, Mariadriana},
  keywords = {Atomic Layer Deposition, precursors, lithium, reaction mechanism, mass spectrometry},
  title = {Data underlying the publication: Role of the Coreactant on the Dual-Source Behavior of Lithium Hexamethyldisilazide for ALD Li-Containing Films},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC BY 4.0},
}