Data underlying the PhD dissertation: A lensless approach to EUV metrology with a High Harmonic Generation source
doi:10.4121/8f176743-cc01-4fe5-869c-e6e20f9f2033.v1
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doi: 10.4121/8f176743-cc01-4fe5-869c-e6e20f9f2033
doi: 10.4121/8f176743-cc01-4fe5-869c-e6e20f9f2033
Datacite citation style:
Weerdenburg, Sven (2024): Data underlying the PhD dissertation: A lensless approach to EUV metrology with a High Harmonic Generation source. Version 1. 4TU.ResearchData. collection. https://doi.org/10.4121/8f176743-cc01-4fe5-869c-e6e20f9f2033.v1
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Collection
categories
This dataset supports Sven Weerdenburg's PhD dissertation. It contains supplementary information supporting the dissertation. This dataset includes raw ptychography data, reconstructed ptychography data, schlieren data and the code the analyze the schlieren data. There is a README document for each chapter.
history
- 2024-09-29 first online, published, posted
publisher
4TU.ResearchData
funding
- LINX (grant code P16-08) NWO
organizations
Delft University of Technology