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Totals for datasets (co-)authored by Nicholas Chittock
490
downloads
1708
views
Nicholas Chittock
Datasets
Data underlying the publication: Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
Isotropic plasma atomic layer etching of Al2O3
Co-authors
Co-authors of Nicholas Chittock's datasets/collections. Bold: authors with a 4TU.ResearchData account.
Adrie Mackus
Erwin Kessels
Harm Knoops
Simon Elliott
Yi Shu
